Ellipsometer (Film Thickness Measurement System) : FiveLab

Outline:	Ellipsometer is optical instruments which measure the change in polarization state of light beam upon reflection from a sample surface to analyze the film thickness, the optical constants as the refractive index / absorption, or the optical constants of bulk materials. MARY-102 was developed based on the integrated technology with the mottos : Compact size, lower price, higher accuracy and user friendly software.

Features:	High Accuracy By the Rotating Retarder (Quarter Wave Plate) method, Δ region which is difficult to be measured by Rotating Analyzer method can be mesured. User Friendly Software The software for MARY-102 can be selected from two versions to meet requests in each application. 1) "Industrial Version" provides smart functions to measure sample with easy operation. 2) "Research Version" provides excellent functions to measure and analyze with simulation.
Ellipsometer Specifications :

Method	Rotating Retarder Method
Light Source	0.8 mW HeNeLaser (λ@632.8nm)
Beam Diameter	0.8mm Φ
Incident Angle	Auto, Manual or Fixed (Auto : 45-90 degree, 0.01 degree step)
Sample Stage	6" standard (8" & 12" optional) Auto θ-Y or Manual θ-Y Motor-driven Z-axis or Manual Z-axis Manual tilt control
Accuracy	Δ=±0.01 degree Ψ=±0.01 degree @SiO2(1000Å)/Si
Sampling Time	0.05 sec minimum
Software	Select from "Research" or "Industrial"
PC	IBM-PC compatible
Dimensions	300(W) x 400(D) x 450(H)mm
Electric Supply	AC100V(±10）　5A（MAX)

NEW!! Ultra-compact Ellipsometer MACO-101